About this ebook
The papers showcased here share the latest findings on optical metrology, optical imaging, nanometrology, intelligent systems, and process control, making the book a valuable asset for researchers, engineers, and university students alike.
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About the author
Jinlong Zhu received the Ph.D. degree in mechanical engineering from Huazhong University of Science and Technology (HUST), Wuhan, China, in 2015. From 2015 to 2020, he worked as a post-doctoral researcher at the University of Illinois Urbana-Champaign, Champaign, IL, USA. He became a professor with Huazhong University of Science and Technology in 2020. He conducts research on basic science and engineering at the intersection of optical physics, nanodevices, semiconductor integrated circuit (IC) chips in industrial robots, and machine learning.
Shiyuan Liu received his Ph.D. in mechanical engineering from Huazhong University of Science and Technology (HUST), Wuhan, China in 1998, and worked as a visiting scholar at University of Manchester, UK, from 2000 to 2001. He has become a full professor with HUST since 2005 and is currently the director of the Precision Instrument Research Center (PIRC) at HUST. He was elected as a fellow of the Institute of Physics (IOP) and a board member of the International Committee of Measurement and Instrumentation (ICMI). His main research interests are computational imaging and computational lithography, nanometrology and instrumentation, and inline measurement and inspection for semiconductor manufacturing.
Shuming Yang is a full professor of Xi'an Jiaotong University (XJTU), China. He achieved bachelor degree and master degree from Xi'an Jiaotong University and Ph.D. from the University of Huddersfield. His main research interests include nanofabrication and measurement, optical measurement and instrumentation, intelligent manufacturing etc. He was elected as a fellow of the International Society for Nanomanufacturing (ISNM), and is the current president of Asian Society for Precision Engineering and Nanotechnology (ASPEN) etc. He is also an editor or a guest editor of JMS, IJPEM-GT, NMME, PE, IJRAT, FME, IJEM, MST, IJAMT, Photonics etc. He delivered plenary/keynote/invited talks in academic conferences over 100 times.
